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X-ray lithography
Results: 49

#	Item
21	2008 International Workshop on EUV Lithography Add to Reading List Source URL: euvlitho.com Language: English - Date: 2013-11-17 22:17:14 Radiation Plasma physics Extreme ultraviolet X-ray astronomy National Concert Hall X-ray Electromagnetic radiation Medicine Extreme ultraviolet lithography
22	2008 International Workshop on EUV Lithography Add to Reading List Source URL: www.euvlitho.com Language: English - Date: 2014-11-29 20:50:24 Extreme ultraviolet Plasma physics Laboratory for Energy Conversion Technology Institute for Spectroscopy Russian Academy of Sciences X-ray lithography Free-electron laser X-ray astronomy Electromagnetic radiation Extreme ultraviolet lithography Physics
23	Published in CP730, Atomic Processes in Plasmas: 14th APS Topical Conference on Atomic Processes in Plasmas , edited by J. S. Cohen, S. Mazevet, and D. P. Kilcrease, (AIP, New York, 2004) p[removed]Visible, EUV, and X- Add to Reading List Source URL: physics.nist.gov Language: English - Date: 2005-02-11 16:09:07 Particle physics Nuclear physics Electron beam Electron beam ion trap Extreme ultraviolet lithography Lawrence Livermore National Laboratory Electronvolt Extreme ultraviolet X-ray astronomy Physics Atomic physics Plasma physics
24	VOLUME 77, NUMBER 8 PHYSICAL REVIEW LETTERS 19 AUGUST 1996 Add to Reading List Source URL: www.engr.colostate.edu Language: English - Date: 2007-09-27 10:48:20 Acronyms Laser Photonics X-ray laser Plasma Extreme ultraviolet lithography Active laser medium Dense plasma focus Ti-sapphire laser Physics Optics Laser science
25	NuSTAR ground calibration: The Rainwater Memorial Calibration Facility (RaMCaF) Nicolai F. Brejnholta , Finn E. Christensena , Anders C. Jakobsena , Charles J. Haileyb , Jason E. Koglinb , Kenneth L. Blaedelb , Marcela S Add to Reading List Source URL: www.nustar.caltech.edu Language: English - Date: 2012-01-15 21:46:43 Electromagnetic radiation Optics Space telescopes X-ray telescopes Telescopes Nuclear Spectroscopic Telescope Array X-ray optics Optical coating Extreme ultraviolet lithography Radiography Science Observational astronomy
26	1 Yield Enhancement Difficult Challenges Difficult Challenges[removed]Summary of Issues Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-27 11:44:03 Scanning probe microscopy Microscopy Failure analysis Energy-dispersive X-ray spectroscopy Extreme ultraviolet lithography PCOLA-SOQ Science Scientific method Measuring instruments
27	1 Yield Enhancement Difficult Challenges Difficult Challenges[removed]Summary of Issues Add to Reading List Source URL: www.itrs.net Language: English - Date: 2014-03-27 11:44:03 Scanning probe microscopy Microscopy Failure analysis Energy-dispersive X-ray spectroscopy Extreme ultraviolet lithography PCOLA-SOQ Science Scientific method Measuring instruments
28 $Diffraction / Scattering / Condensed matter physics / Optics / Extreme ultraviolet lithography / X-ray reflectivity / X-ray scattering techniques / Superlattice / Powder diffraction / Physics / Science / Scientific method$	JOURNAL OF APPLIED PHYSICS VOLUME 89, NUMBER 2 15 JANUARY 2001 Add to Reading List Source URL: ssrl.slac.stanford.edu Language: English - Date: 2010-06-28 16:02:40 Diffraction Scattering Condensed matter physics Optics Extreme ultraviolet lithography X-ray reflectivity X-ray scattering techniques Superlattice Powder diffraction Physics Science Scientific method
29	INSTITUTE OF PHYSICS PUBLISHING METROLOGIA Metrologia[removed]S229–S232 Add to Reading List Source URL: physics.nist.gov Language: English - Date: 2010-08-18 08:54:34 Radiation Electromagnetic spectrum Extreme ultraviolet lithography Optical coating Monochromator Extreme ultraviolet Ultraviolet Next-generation lithography X-ray Electromagnetic radiation Physics Spectroscopy
30	Copyright 1993 So iety of Photo-Opti al Instrumentation Engineers. This paper was published in {Multilayer and grazing in iden e X-ray/EUV opti s for astronomy and proje tion lithography }, Pro eedings of SPIE Vol. A93-3 Add to Reading List Source URL: asc.harvard.edu Language: English - Date: 2008-12-18 13:55:49 Geometrical optics Physical optics Electron microscopy Aperture Observational astronomy Science of photography X-ray Scanning electron microscope 3D modeling Optics Electromagnetic radiation Scientific method

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